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Planar positioning stage for micro machining

J. Bauer, D. Kern, S. Ayhan, S. Scherr, Jürgen Fleischer, W. Seemann, T. Zwick. Planar positioning stage for micro machining. Production Engineering, 7(5):511-516, 2013. [doi]

Authors

J. Bauer

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D. Kern

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S. Ayhan

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S. Scherr

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Jürgen Fleischer

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W. Seemann

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T. Zwick

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