J. Bauer, D. Kern, S. Ayhan, S. Scherr, Jürgen Fleischer, W. Seemann, T. Zwick. Planar positioning stage for micro machining. Production Engineering, 7(5):511-516, 2013. [doi]
@article{BauerKASFSZ13,
title = {Planar positioning stage for micro machining},
author = {J. Bauer and D. Kern and S. Ayhan and S. Scherr and Jürgen Fleischer and W. Seemann and T. Zwick},
year = {2013},
doi = {10.1007/s11740-013-0474-2},
url = {http://dx.doi.org/10.1007/s11740-013-0474-2},
researchr = {https://researchr.org/publication/BauerKASFSZ13},
cites = {0},
citedby = {0},
journal = {Production Engineering},
volume = {7},
number = {5},
pages = {511-516},
}