Service-based Semiconductor Manufacturing using the Digital Reference Ontology for Global Service Discovery

Hartwig Baumgärtel, Patrick Moder, Nour Ramzy, Hans Ehm. Service-based Semiconductor Manufacturing using the Digital Reference Ontology for Global Service Discovery. In The 46th Annual Conference of the IEEE Industrial Electronics Society, IECON 2020, Singapore, October 18-21, 2020. pages 4533-4540, IEEE, 2020. [doi]

Authors

Hartwig Baumgärtel

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Patrick Moder

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Nour Ramzy

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Hans Ehm

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