Service-based Semiconductor Manufacturing using the Digital Reference Ontology for Global Service Discovery

Hartwig Baumgärtel, Patrick Moder, Nour Ramzy, Hans Ehm. Service-based Semiconductor Manufacturing using the Digital Reference Ontology for Global Service Discovery. In The 46th Annual Conference of the IEEE Industrial Electronics Society, IECON 2020, Singapore, October 18-21, 2020. pages 4533-4540, IEEE, 2020. [doi]

Abstract

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