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Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes

Ali Bazaei, Ali Mohammadi, S. O. Reza Moheimani. Sensing bandwidth of electrothermal MEMS transducers in constant voltage and current modes. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2014, Besancon, France, July 8-11, 2014. pages 1464-1468, IEEE, 2014. [doi]

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