2 direct hybrid bonding

Yann Beilliard, Stéphane Moreau, Léa Di Cioccio, Perceval Coudrain, G. Romano, A. Nowodzinski, F. Aussenac, P.-H. Jouneau, E. Rolland, Thomas Signamarcheix. 2 direct hybrid bonding. In 2014 International 3D Systems Integration Conference, 3DIC 2014, Kinsdale, Ireland, December 1-3, 2014. pages 1-8, IEEE, 2014. [doi]

@inproceedings{BeilliardMCCRNA14,
  title = {2 direct hybrid bonding},
  author = {Yann Beilliard and Stéphane Moreau and Léa Di Cioccio and Perceval Coudrain and G. Romano and A. Nowodzinski and F. Aussenac and P.-H. Jouneau and E. Rolland and Thomas Signamarcheix},
  year = {2014},
  doi = {10.1109/3DIC.2014.7274306},
  url = {http://dx.doi.org/10.1109/3DIC.2014.7274306},
  researchr = {https://researchr.org/publication/BeilliardMCCRNA14},
  cites = {0},
  citedby = {0},
  pages = {1-8},
  booktitle = {2014 International 3D Systems Integration Conference, 3DIC 2014, Kinsdale, Ireland, December 1-3, 2014},
  publisher = {IEEE},
  isbn = {978-1-4799-8472-5},
}