AFM image based pattern detection for adaptive drift compensation and positioning at the nanometer scale

Sergey Belikov, Jian Shi, Chanmin Su. AFM image based pattern detection for adaptive drift compensation and positioning at the nanometer scale. In American Control Conference, ACC 2008, Seattle, WA, USA, 11-13 June 2008. pages 2046-2051, IEEE, 2008. [doi]

Authors

Sergey Belikov

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Jian Shi

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Chanmin Su

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