Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements

Vincas Benevicius, Vytautas Ostasevicius, Rimvydas Gaidys. Identification of Capacitive MEMS Accelerometer Structure Parameters for Human Body Dynamics Measurements. Sensors, 13(9):11184-11195, 2013. [doi]

Abstract

Abstract is missing.