Günther Benstetter, Peter Breitschopf, Werner Frammelsberger, Heiko Ranzinger, Peter Reislhuber, Thomas Schweinböck. AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis. Microelectronics Reliability, 44(9-11):1615-1619, 2004. [doi]
@article{BenstetterBFRRS04,
title = {AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis},
author = {Günther Benstetter and Peter Breitschopf and Werner Frammelsberger and Heiko Ranzinger and Peter Reislhuber and Thomas Schweinböck},
year = {2004},
doi = {10.1016/j.microrel.2004.07.079},
url = {http://dx.doi.org/10.1016/j.microrel.2004.07.079},
researchr = {https://researchr.org/publication/BenstetterBFRRS04},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {44},
number = {9-11},
pages = {1615-1619},
}