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AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis

Günther Benstetter, Peter Breitschopf, Werner Frammelsberger, Heiko Ranzinger, Peter Reislhuber, Thomas Schweinböck. AFM-based scanning capacitance techniques for deep sub-micron semiconductor failure analysis. Microelectronics Reliability, 44(9-11):1615-1619, 2004. [doi]

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