Simulation and 3D Characterization of Microsystems

Bogdan Bercu, Laurent Montès, Panagiota Morfouli, Nathalie Mathieu. Simulation and 3D Characterization of Microsystems. In IEEE International Conference on Microelectronic Systems Education, MSE '07, San Diego, CA, USA, June 3-4, 2007. pages 107-108, IEEE Computer Society, 2007. [doi]

Authors

Bogdan Bercu

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Laurent Montès

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Panagiota Morfouli

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Nathalie Mathieu

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