Simulation and 3D Characterization of Microsystems

Bogdan Bercu, Laurent Montès, Panagiota Morfouli, Nathalie Mathieu. Simulation and 3D Characterization of Microsystems. In IEEE International Conference on Microelectronic Systems Education, MSE '07, San Diego, CA, USA, June 3-4, 2007. pages 107-108, IEEE Computer Society, 2007. [doi]

@inproceedings{BercuMMM07,
  title = {Simulation and 3D Characterization of Microsystems},
  author = {Bogdan Bercu and Laurent Montès and Panagiota Morfouli and Nathalie Mathieu},
  year = {2007},
  doi = {10.1109/MSE.2007.75},
  url = {http://doi.ieeecomputersociety.org/10.1109/MSE.2007.75},
  researchr = {https://researchr.org/publication/BercuMMM07},
  cites = {0},
  citedby = {0},
  pages = {107-108},
  booktitle = {IEEE International Conference on Microelectronic Systems Education, MSE '07, San Diego, CA, USA, June 3-4, 2007},
  publisher = {IEEE Computer Society},
  isbn = {0-7695-2849-X},
}