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Protective nanometer films for reliable Cu-Cu connections

Tobias Berthold, Guenther Benstetter, Werner Frammelsberger, Manuel Bogner, Rosana Rodríguez, Montserrat Nafría. Protective nanometer films for reliable Cu-Cu connections. Microelectronics Reliability, 76:383-389, 2017. [doi]

Authors

Tobias Berthold

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Guenther Benstetter

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Werner Frammelsberger

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Manuel Bogner

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Rosana Rodríguez

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Montserrat Nafría

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