High-performance PIN photodiodes on TMAH thinned silicon wafers

Gian-Franco Dalla Betta, S. Ronchin, A. Zoboli, N. Zorzi. High-performance PIN photodiodes on TMAH thinned silicon wafers. Microelectronics Journal, 39(12):1485-1490, 2008. [doi]

@article{BettaRZZ08,
  title = {High-performance PIN photodiodes on TMAH thinned silicon wafers},
  author = {Gian-Franco Dalla Betta and S. Ronchin and A. Zoboli and N. Zorzi},
  year = {2008},
  doi = {10.1016/j.mejo.2008.04.009},
  url = {http://dx.doi.org/10.1016/j.mejo.2008.04.009},
  researchr = {https://researchr.org/publication/BettaRZZ08},
  cites = {0},
  citedby = {0},
  journal = {Microelectronics Journal},
  volume = {39},
  number = {12},
  pages = {1485-1490},
}