A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane - researchr publication authors

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P. Bhattacharyya, P. K. Basu, B. Mondal, H. Saha. A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane. Microelectronics Reliability, 48(11-12):1772-1779, 2008. [doi]

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