A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane

P. Bhattacharyya, P. K. Basu, B. Mondal, H. Saha. A low power MEMS gas sensor based on nanocrystalline ZnO thin films for sensing methane. Microelectronics Reliability, 48(11-12):1772-1779, 2008. [doi]

Abstract

Abstract is missing.