Advanced backside failure analysis in 65 nm CMOS technology

Stephane Bianic, Stéphanie Allemand, Grégory Kerrosa, Pascal Scafidi, Didier Renard. Advanced backside failure analysis in 65 nm CMOS technology. Microelectronics Reliability, 47(9-11):1550-1554, 2007. [doi]

Abstract

Abstract is missing.