Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling - researchr publication authors

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Roland Biberger, Guenther Benstetter, Thomas Schweinboeck, Peter Breitschopf, Holger Goebel. Intermittent-contact scanning capacitance microscopy versus contact mode SCM applied to 2D dopant profiling. Microelectronics Reliability, 48(8-9):1339-1342, 2008. [doi]

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