Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example - researchr publication authors

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Tomasz Bieniek, Grzegorz Janczyk, Magdalena Ekwinska, T. Budzynski, Piotr Gluszko, Piotr Grabiec, A. Kociubinski. Novel methodology for 3D MEMS-IC design and co-simulation on MEMS microphone smart system example. In 2014 International 3D Systems Integration Conference, 3DIC 2014, Kinsdale, Ireland, December 1-3, 2014. pages 1-5, IEEE, 2014. [doi]

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