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3 dielectric films for MEMS capacitive switches

D. Birmpiliotis, Matroni Koutsoureli, J. Kohylas, George J. Papaioannou, A. Ziaei. 3 dielectric films for MEMS capacitive switches. Microelectronics Reliability, 88:840-845, 2018. [doi]

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D. Birmpiliotis

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Matroni Koutsoureli

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J. Kohylas

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George J. Papaioannou

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A. Ziaei

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