D. Birmpiliotis, Matroni Koutsoureli, J. Kohylas, George J. Papaioannou, A. Ziaei. 3 dielectric films for MEMS capacitive switches. Microelectronics Reliability, 88:840-845, 2018. [doi]
@article{BirmpiliotisKKP18,
title = {3 dielectric films for MEMS capacitive switches},
author = {D. Birmpiliotis and Matroni Koutsoureli and J. Kohylas and George J. Papaioannou and A. Ziaei},
year = {2018},
doi = {10.1016/j.microrel.2018.07.087},
url = {https://doi.org/10.1016/j.microrel.2018.07.087},
researchr = {https://researchr.org/publication/BirmpiliotisKKP18},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {88},
pages = {840-845},
}