K. Biswas, S. Das, S. Kal. Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures. Microelectronics Journal, 37(8):765-769, 2006. [doi]
@article{BiswasDK06,
title = {Analysis and prevention of convex corner undercutting in bulk micromachined silicon microstructures},
author = {K. Biswas and S. Das and S. Kal},
year = {2006},
doi = {10.1016/j.mejo.2005.10.010},
url = {http://dx.doi.org/10.1016/j.mejo.2005.10.010},
tags = {analysis},
researchr = {https://researchr.org/publication/BiswasDK06},
cites = {0},
citedby = {0},
journal = {Microelectronics Journal},
volume = {37},
number = {8},
pages = {765-769},
}