Jens Bonitz, Simon Bottger, Sascha Hermann, Stefan E. Schulz, Thomas Gessner, Steffen Hartmann, Bernhard Wunderle. Wafer-level technology for integration of carbon nanotubes into micro-electro-mechanical systems. In 11th IEEE Annual International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2016, Sendai, Japan, April 17-20, 2016. pages 595-599, IEEE, 2016. [doi]
Abstract is missing.