Lithography Hotspots Detection Using Deep Learning - researchr publication authors

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Vadim Borisov, Jürgen Scheible. Lithography Hotspots Detection Using Deep Learning. In 15th International Conference on Synthesis, Modeling, Analysis and Simulation Methods and Applications to Circuit Design, SMACD 2018, Prague, Czech Republic, July 2-5, 2018. pages 145-148, IEEE, 2018. [doi]

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