Bruno Borovic, C. Hong, X. M. Zhang, Aiqun Q. Liu, Frank L. Lewis. Open vs. Closed-Loop Control of the MEMS Electrostatic Comb Drive. In Intelligent Control, 2005. Proceedings of the 2005 IEEE International Symposium on, Mediterrean Conference on Control and Automation, Limassol, Cyprus, 27-29 June, 2005. pages 982-988, IEEE, 2005. [doi]
Abstract is missing.