Bernhard E. Boser, Roger T. Howe. Surface micromachined accelerometers. J. Solid-State Circuits, 31(3):366-375, 1996. [doi]
@article{BoserH96,
title = {Surface micromachined accelerometers},
author = {Bernhard E. Boser and Roger T. Howe},
year = {1996},
url = {https://www.wikidata.org/entity/Q56483703},
researchr = {https://researchr.org/publication/BoserH96},
cites = {0},
citedby = {0},
journal = {J. Solid-State Circuits},
volume = {31},
number = {3},
pages = {366-375},
}