Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process

Ansel Briffa, Edward Gatt, Joseph Micallef, Ivan Grech, Owen Casha, Jean Marie Darmanin. Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process. In Proceedings of Eurocon 2013, International Conference on Computer as a Tool, Zagreb, Croatia, July 1-4, 2013. pages 2094-2099, IEEE, 2013. [doi]

@inproceedings{BriffaGMGCD13,
  title = {Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process},
  author = {Ansel Briffa and Edward Gatt and Joseph Micallef and Ivan Grech and Owen Casha and Jean Marie Darmanin},
  year = {2013},
  doi = {10.1109/EUROCON.2013.6625269},
  url = {http://dx.doi.org/10.1109/EUROCON.2013.6625269},
  researchr = {https://researchr.org/publication/BriffaGMGCD13},
  cites = {0},
  citedby = {0},
  pages = {2094-2099},
  booktitle = {Proceedings of Eurocon 2013, International Conference on Computer as a Tool, Zagreb, Croatia, July 1-4, 2013},
  publisher = {IEEE},
  isbn = {978-1-4673-2230-0},
}