Ansel Briffa, Edward Gatt, Joseph Micallef, Ivan Grech, Owen Casha, Jean Marie Darmanin. Area minimization of a three-axis separate mass capacitive accelerometer using the ThELMA process. In Proceedings of Eurocon 2013, International Conference on Computer as a Tool, Zagreb, Croatia, July 1-4, 2013. pages 2094-2099, IEEE, 2013. [doi]
Abstract is missing.