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Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response

Nuno Brito, Carlos Ferreira, Filipe Alves, Jorge Cabral, João Gaspar, João L. Monteiro, Luís Rocha. Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response. Sensors, 16(9):1553, 2016. [doi]

Authors

Nuno Brito

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Carlos Ferreira

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Filipe Alves

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Jorge Cabral

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João Gaspar

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João L. Monteiro

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Luís Rocha

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