Nuno Brito, Carlos Ferreira, Filipe Alves, Jorge Cabral, João Gaspar, João L. Monteiro, Luís Rocha. Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response. Sensors, 16(9):1553, 2016. [doi]
@article{BritoFACGMR16,
title = {Digital Platform for Wafer-Level MEMS Testing and Characterization Using Electrical Response},
author = {Nuno Brito and Carlos Ferreira and Filipe Alves and Jorge Cabral and João Gaspar and João L. Monteiro and Luís Rocha},
year = {2016},
doi = {10.3390/s16091553},
url = {http://dx.doi.org/10.3390/s16091553},
researchr = {https://researchr.org/publication/BritoFACGMR16},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {16},
number = {9},
pages = {1553},
}