Characteristics and Mechanism of Catalyst-Referred Etching Method: Application to 4H-SiC

Pho Van Bui, Yasuhisa Sano, Yoshitada Morikawa, Kazuto Yamauchi. Characteristics and Mechanism of Catalyst-Referred Etching Method: Application to 4H-SiC. IJAT, 12(2):154-159, 2018. [doi]

Abstract

Abstract is missing.