First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls

Federico Buja, Jaap Kokorian, Anirudha V. Sumant, W. Merlijn van Spengen. First adhesion measurements of conductive ultrananocrystalline diamond MEMS sidewalls. In 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2014, Waikiki Beach, HI, USA, April 13-16, 2014. pages 77-80, IEEE, 2014. [doi]

Abstract

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