A comparison of ILC architectures for nanopositioners with applications to AFM raster tracking

Jeffrey A. Butterworth, Lucy Y. Pao, Daniel Y. Abramovitch. A comparison of ILC architectures for nanopositioners with applications to AFM raster tracking. In American Control Conference, ACC 2011, San Francisco, CA, USA, June 29 - July 1, 2011. pages 2266-2271, IEEE, 2011. [doi]

Abstract

Abstract is missing.