A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization - researchr publication authors

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Haoshu Cai, Jianshe Feng, Qibo Yang, Wenzhe Li, Xiang Li, Jay Lee. A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization. Computers in Industry, 119:103228, 2020. [doi]

This author has not been identified. Look up 'Haoshu Cai' in GoogleThis author has not been identified. Look up 'Jianshe Feng' in GoogleThis author has not been identified. Look up 'Qibo Yang' in GoogleThis author has not been identified. Look up 'Wenzhe Li' in GoogleThis author has not been identified. Look up 'Xiang Li' in GoogleThis author has not been identified. Look up 'Jay Lee' in Google

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