Haoshu Cai, Jianshe Feng, Qibo Yang, Wenzhe Li, Xiang Li, Jay Lee. A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization. Computers in Industry, 119:103228, 2020. [doi]
@article{CaiFYLLL20,
title = {A virtual metrology method with prediction uncertainty based on Gaussian process for chemical mechanical planarization},
author = {Haoshu Cai and Jianshe Feng and Qibo Yang and Wenzhe Li and Xiang Li and Jay Lee},
year = {2020},
doi = {10.1016/j.compind.2020.103228},
url = {https://doi.org/10.1016/j.compind.2020.103228},
researchr = {https://researchr.org/publication/CaiFYLLL20},
cites = {0},
citedby = {0},
journal = {Computers in Industry},
volume = {119},
pages = {103228},
}