Spectroscopic Chemical Sensing Based on Narrowband MEMS Resonant Infrared Detectors

Sila Deniz Calisgan, Vladimir Villanueva-Lopez, Vageeswar Rajaram, Zhenyun Qian, Sungho Kang, Samuel P. Hernandez-Rivera, Matteo Rinaldi. Spectroscopic Chemical Sensing Based on Narrowband MEMS Resonant Infrared Detectors. In 2018 IEEE SENSORS, New Delhi, India, October 28-31, 2018. pages 1-4, IEEE, 2018. [doi]

Abstract

Abstract is missing.