Robust control of piezostage for nanoscale three-dimensional images acquisition

Luca Cavanini, Maria Letizia Corradini, Luigino Criante, Andrea di Donato, Marco Farina, Gianluca Ippoliti, Sara Lo Turco, Giuseppe Orlando, Carmine Travaglini. Robust control of piezostage for nanoscale three-dimensional images acquisition. In IECON 2016 - 42nd Annual Conference of the IEEE Industrial Electronics Society, Florence, Italy, October 23-26, 2016. pages 5107-5112, IEEE, 2016. [doi]

Abstract

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