Electrical qualification of new ultrathin integration techniques

A. Cazarré, F. Lépinois, A. Marty, S. Pinel, J. Tasselli, J. P. Bailbé, J. R. Morante, F. Murray. Electrical qualification of new ultrathin integration techniques. Microelectronics Reliability, 43(1):111-115, 2003. [doi]

Abstract

Abstract is missing.