Multimode Air-Coupled Excitation of Micromechanical Structures

Cetin Cetinkaya, Liang Ban, Ganesh Subramanian, Ilgaz Akseli. Multimode Air-Coupled Excitation of Micromechanical Structures. IEEE T. Instrumentation and Measurement, 57(11):2457-2461, 2008. [doi]

Abstract

Abstract is missing.