A Defect Detection Model for Imbalanced Wafer Image Data Using CAE and Xception

Jaegyeong Cha, Seokju Oh, Donghyun Kim 0005, Jongpil Jeong. A Defect Detection Model for Imbalanced Wafer Image Data Using CAE and Xception. In International Conference on Intelligent Data Science Technologies and Applications, IDSTA 2020, Valencia, Spain (Online Event), October 19-22, 2020. pages 28-33, IEEE, 2020. [doi]

Abstract

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