A Novel Defect Classification Scheme Based on Convolutional Autoencoder with Skip Connection in Semiconductor Manufacturing

Jaegyeong Cha, Juyong Park, Jongpil Jeong. A Novel Defect Classification Scheme Based on Convolutional Autoencoder with Skip Connection in Semiconductor Manufacturing. In 24th International Conference on Advanced Communication Technology, ICACT 2022, Pyeongchang, Korea, February 13-16, 2022. pages 347-352, IEEE, 2022. [doi]

Abstract

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