Mohamad Chakaroun, Mohand Djeziri, Mustapha Ouladsine, Jacques Pinaton. Defect diagnosis using in line product control data in semiconductor industry. In 4th International Conference on Systems and Control, ICSC 2015, Sousse, Tunisia, April 28-30, 2015. pages 212-217, IEEE, 2015. [doi]
Abstract is missing.