Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, F. C. S. Lee, Chen-Jung Tsai. Design and fabrication of a MEMS scanning mirror with and without comb offset. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 186-190, IEEE, 2010. [doi]
@inproceedings{ChanWWMCCCLT10,
title = {Design and fabrication of a MEMS scanning mirror with and without comb offset},
author = {Yick Chuen Chan and Chun Cheong Wong and Congshun Wang and Wei Ma and Ho-Yin Chan and Shoulung Chen and Hon Lung Cheung and F. C. S. Lee and Chen-Jung Tsai},
year = {2010},
doi = {10.1109/NEMS.2010.5592180},
url = {http://dx.doi.org/10.1109/NEMS.2010.5592180},
researchr = {https://researchr.org/publication/ChanWWMCCCLT10},
cites = {0},
citedby = {0},
pages = {186-190},
booktitle = {5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010},
publisher = {IEEE},
}