Yick Chuen Chan, Chun Cheong Wong, Congshun Wang, Wei Ma, Ho-Yin Chan, Shoulung Chen, Hon Lung Cheung, F. C. S. Lee, Chen-Jung Tsai. Design and fabrication of a MEMS scanning mirror with and without comb offset. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 186-190, IEEE, 2010. [doi]
Abstract is missing.