Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis

Wai Kin (Victor) Chan, Jingang Yi, Shengwei Ding. Optimal Scheduling of Multicluster Tools With Constant Robot Moving Times, Part I: Two-Cluster Analysis. IEEE T. Automation Science and Engineering, 8(1):5-16, 2011. [doi]

Abstract

Abstract is missing.