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Remote carrier trapping in FinFETs with ONO buried layer: Temperature effects

Sung-Jae Chang, Maryline Bawedin, Wade Xiong, Jong-Hyun Lee, Jung Hee Lee, Sorin Cristoloveanu. Remote carrier trapping in FinFETs with ONO buried layer: Temperature effects. Microelectronics Reliability, 53(3):386-393, 2013. [doi]

Authors

Sung-Jae Chang

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Maryline Bawedin

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Wade Xiong

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Jong-Hyun Lee

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Jung Hee Lee

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Sorin Cristoloveanu

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