Remote carrier trapping in FinFETs with ONO buried layer: Temperature effects

Sung-Jae Chang, Maryline Bawedin, Wade Xiong, Jong-Hyun Lee, Jung Hee Lee, Sorin Cristoloveanu. Remote carrier trapping in FinFETs with ONO buried layer: Temperature effects. Microelectronics Reliability, 53(3):386-393, 2013. [doi]

Abstract

Abstract is missing.