Sensitivity enhancement in SGOI nanowire biosensor fabricated by top surface passivation

Kow-Ming Chang, Chu-Feng Chen, Chiung-Hui Lai, Cheng-Ting Hsieh, Chin-Ning Wu, Yu-Bin Wang, Chung-Hsien Liu. Sensitivity enhancement in SGOI nanowire biosensor fabricated by top surface passivation. In 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012, Kyoto, Japan, March 5-8, 2012. pages 579-582, IEEE, 2012. [doi]

Abstract

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