AI-based 3D Metrology and Defect Detection of HBMs in XRM Scans

Richard Chang 0002, Wang Jie, Namrata Thakur, Ramanpreet Singh Pahwa. AI-based 3D Metrology and Defect Detection of HBMs in XRM Scans. World Sci. Annu. Rev. Artif. Intell., 1, 2023. [doi]

@article{ChangJTP23,
  title = {AI-based 3D Metrology and Defect Detection of HBMs in XRM Scans},
  author = {Richard Chang 0002 and Wang Jie and Namrata Thakur and Ramanpreet Singh Pahwa},
  year = {2023},
  doi = {10.1142/S2811032324400022},
  url = {https://doi.org/10.1142/S2811032324400022},
  researchr = {https://researchr.org/publication/ChangJTP23},
  cites = {0},
  citedby = {0},
  journal = {World Sci. Annu. Rev. Artif. Intell.},
  volume = {1},
}