AI-based 3D Metrology and Defect Detection of HBMs in XRM Scans

Richard Chang 0002, Wang Jie, Namrata Thakur, Ramanpreet Singh Pahwa. AI-based 3D Metrology and Defect Detection of HBMs in XRM Scans. World Sci. Annu. Rev. Artif. Intell., 1, 2023. [doi]

Abstract

Abstract is missing.